Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9116429 | Resist underlayer polymer, resist underlayer composition including the same, and method of patterning using the same | Jee-Yun Song, Hwan-Sung Cheon, Sung Wook Cho, Min Soo Kim, Seung-Bae Oh | 2015-08-25 |
| 8697341 | Aromatic ring containing polymer, underlayer composition including the same, and associated methods | Jin Kuk Lee, Hwan-Sung Cheon, Min Soo Kim, Jee-Yun Song | 2014-04-15 |
| 8617792 | Aromatic ring-containing polymer for resist underlayer, resist underlayer composition including the same, and method of patterning device using the same | Sung Wook Cho, Min Soo Kim, Seung-Bae Oh, Jee-Yun Song, Hwan-Sung Cheon | 2013-12-31 |
| 8445187 | Hardmask composition having antireflective properties and method of patterning material on substrate using the same | Jong-seob Kim, Dong Seon Uh, Hwan-Sung Cheon, Chang Il Oh, Min Soo Kim +1 more | 2013-05-21 |
| 8420289 | Aromatic ring-containing polymer, polymer mixture, antireflective hardmask composition, and associated methods | Min Soo Kim, Dong Seon Uh, Chang Il Oh, Kyung-Hee HYUNG, Jin Kuk Lee +4 more | 2013-04-16 |
| 8263321 | Polymer having antireflective properties and high carbon content, hardmask composition including the same, and process for forming a patterned material layer | Jong-seob Kim, Dong Seon Uh, Chang Il Oh, Kyung-Hee HYUNG, Min Soo Kim +1 more | 2012-09-11 |
| 8153349 | Polymer composition, hardmask composition having antireflective properties, and associated methods | Hwan-Sung Cheon, Jong-seob Kim, Min Soo Kim, Jin Kuk Lee, Jee-Yun Song | 2012-04-10 |
| 7981594 | Hardmask composition having antirelective properties and method of patterning material on susbstrate using the same | Jong-seob Kim, Dong Seon Uh, Hwan-Sung Cheon, Chang Il Oh, Min Soo Kim +1 more | 2011-07-19 |
| 7862990 | Polymer having antireflective properties and high carbon content, hardmask composition including the same, and process for forming a patterned material layer | Jong-seob Kim, Dong Seon Uh, Chang Il Oh, Kyung-Hee HYUNG, Min Soo Kim +1 more | 2011-01-04 |
| 7659051 | Polymer having antireflective properties, hardmask composition including the same, and process for forming a patterned material layer | Jong-seob Kim, Dong Seon Uh, Chang Il Oh, Kyung-Hee HYUNG, Min Soo Kim +1 more | 2010-02-09 |
| 7655386 | Polymer having antireflective properties, hardmask composition including the same, process for forming a patterned material layer, and associated device | Kyung-Hee HYUNG, Jong-seob Kim, Dong Seon Uh, Chang Il Oh, Min Soo Kim +1 more | 2010-02-02 |