Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9116429 | Resist underlayer polymer, resist underlayer composition including the same, and method of patterning using the same | Hwan-Sung Cheon, Sung Wook Cho, Kyong Ho Yoon, Min Soo Kim, Seung-Bae Oh | 2015-08-25 |
| 9018776 | Hardmask composition including aromatic ring-containing compound, method of forming patterns, and semiconductor integrated circuit device including the patterns | Min Soo Kim, Hwan-Sung Cheon, Seung-Bae Oh, Yoo-Jeong Choi | 2015-04-28 |
| 8741539 | Hardmask composition, method of forming a pattern using the same, and semiconductor integrated circuit device including the pattern | Seung-Bae Oh, Hwan-Sung Cheon, Sung Wook Cho, Min Soo Kim, Yoo-Jeong Choi | 2014-06-03 |
| 8741540 | Hard mask composition, method of forming a pattern, and semiconductor integrated circuit device including the pattern | Min Soo Kim, Hwan-Sung Cheon, Young Min Kim, Cheol-Ho Lee, Chung-Heon Lee | 2014-06-03 |
| 8697341 | Aromatic ring containing polymer, underlayer composition including the same, and associated methods | Kyong Ho Yoon, Jin Kuk Lee, Hwan-Sung Cheon, Min Soo Kim | 2014-04-15 |
| 8637219 | Aromatic ring-containing compound for a resist underlayer and resist underlayer composition | Sung Wook Cho, Hwan-Sung Cheon, Min Soo Kim, Seung-Bae Oh | 2014-01-28 |
| 8617792 | Aromatic ring-containing polymer for resist underlayer, resist underlayer composition including the same, and method of patterning device using the same | Sung Wook Cho, Kyong Ho Yoon, Min Soo Kim, Seung-Bae Oh, Hwan-Sung Cheon | 2013-12-31 |
| 8415424 | Aromatic ring-containing polymer for underlayer of resist and resist underlayer composition including the same | Min Soo Kim, Hwan-Sung Cheon, Sung Wook Cho, Seung-Bae Oh | 2013-04-09 |
| 8153349 | Polymer composition, hardmask composition having antireflective properties, and associated methods | Hwan-Sung Cheon, Jong-seob Kim, Kyong Ho Yoon, Min Soo Kim, Jin Kuk Lee | 2012-04-10 |