Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660642 | Toxic residual gas removal by non-reactive ion sputtering | Zhou Mei Sheng, Yelehanka Ramachandramurthy Pradeep, Paul Proctor | 2003-12-09 |
| 6124927 | Method to protect chamber wall from etching by endpoint plasma clean | Qinghua Zhong, Yelehanka Ramachandra Murthy Pradeep, Zhou Mei Sheng | 2000-09-26 |