Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6124927 | Method to protect chamber wall from etching by endpoint plasma clean | Qinghua Zhong, Zou Zheng, Zhou Mei Sheng | 2000-09-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6124927 | Method to protect chamber wall from etching by endpoint plasma clean | Qinghua Zhong, Zou Zheng, Zhou Mei Sheng | 2000-09-26 |