Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583069 | Method of silicon oxide and silicon glass films deposition | John Sudijono | 2003-06-24 |
| 6500771 | Method of high-density plasma boron-containing silicate glass film deposition | John Sudijono, Alan Cuthbertson | 2002-12-31 |
| 6355581 | Gas-phase additives for an enhancement of lateral etch component during high density plasma film deposition to improve film gap-fill capability | John Sudijono, Yelehanka Ramachandramurthy Pradeep, Jie Yu | 2002-03-12 |
| 6197705 | Method of silicon oxide and silicon glass films deposition | — | 2001-03-06 |
| 6180490 | Method of filling shallow trenches | Igor Peidous | 2001-01-30 |
| 6027982 | Method to form shallow trench isolation structures with improved isolation fill and surface planarity | Igor Peidous, Chock Hing Gan, Guang Ping Hua | 2000-02-22 |
| 5876798 | Method of fluorinated silicon oxide film deposition | — | 1999-03-02 |