Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9678425 | Polymerizable fluoromonomer, fluoropolymer, resist material, and method of pattern formation | Haruhiko Komoriya, Kenjin Inomiya, Takashi Mori, Takamasa Kitamoto, Yusuke Kanto | 2017-06-13 |
| 9678426 | Polymerizable fluoromonomer, fluoropolymer, resist material, and method of pattern formation | Haruhiko Komoriya, Kenjin Inomiya, Takashi Mori, Takamasa Kitamoto, Yusuke Kanto | 2017-06-13 |
| 9650451 | Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions | Haruhiko Komoriya, Kazuhiko Maeda | 2017-05-16 |
| 8716385 | Polymerizable fluoromonomer, fluoropolymer, resist material, and method of pattern formation | Haruhiko Komoriya, Kenjin Inomiya, Takashi Mori, Takamasa Kitamoto, Yusuke Kanto | 2014-05-06 |
| 8691491 | Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions | Haruhiko Komoriya, Kazuhiko Maeda | 2014-04-08 |
| 8592508 | Top coat composition | Haruhiko Komoriya, Kenjin Inomiya, Takashi Mori, Takamasa Kitamoto, Yusuke Kanto | 2013-11-26 |
| 8115036 | Fluorine-containing cyclic compound, fluorine-containing polymer compound, resist material using same and method for forming pattern | Haruhiko Komoriya, Michitaka Ootani, Takeo Komata, Kazuhiko Maeda | 2012-02-14 |
| 7947422 | Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions | Haruhiko Komoriya, Kazuhiko Maeda | 2011-05-24 |
| 7781602 | Fluorinated cyclic compound, polymerizable fluoromonomer, fluoropolymer, resist material comprising the same, and method of forming pattern with the same | Haruhiko Komoriya, Katsunori Kawamura, Satoru Kobayashi, Satoru Miyazawa, Kazuhiko Maeda | 2010-08-24 |
| 7736835 | Fluorine-containing cyclic compound, fluorine-containing polymer compound, resist material using same and method for forming pattern | Haruhiko Komoriya, Michitaka Ootani, Takeo Komata, Kazuhiko Maeda | 2010-06-15 |
| 7402626 | Top coat composition | Kazuhiko Maeda, Haruhiko Komoriya, Satoru Miyazawa, Michitaka Ootani | 2008-07-22 |
| 7232917 | Cyclic fluorine compounds, polymerizable fluoromonomers, fluoropolymers, and resist materials containing the fluoropolymers and method for pattern formation | Haruhiko Komoriya, Kazuhiko Maeda | 2007-06-19 |
| 7125943 | Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions | Haruhiko Komoriya, Kazuhiko Maeda | 2006-10-24 |
| 7122292 | Lactone compounds, lactone-containing monomers, their polymers, resist compositions using same, and processes for forming patterns using same | Haruhiko Komoriya, Katsutoshi Suzuki, Kazuhiko Maeda | 2006-10-17 |
| 7105618 | Fluorine-containing polymerizable monomers and polymers, anti-reflection film materials and resist compositions using same | Haruhiko Komoriya, Michitaka Otani, Kazuhiko Maeda | 2006-09-12 |
| 6943271 | Process for producing fluorine-containing, polymerizable styrene monomer and intermediates used in same | Takashi Kume, Sunao Koga, Haruhiko Komoriya | 2005-09-13 |