Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9140994 | Method for adjusting an optical system of a microlithographic projection exposure apparatus | Bastian Trauter | 2015-09-22 |
| 8922753 | Optical system for a microlithographic projection exposure apparatus | Daniel Kraehmer | 2014-12-30 |
| 8917433 | Optical system of a microlithographic projection exposure apparatus | — | 2014-12-23 |
| 8891060 | Optical system, in particular of a microlithographic projection exposure apparatus | — | 2014-11-18 |
| 8098366 | Optical system, in particular of a microlithographic projection exposure apparatus | Damian Fiolka | 2012-01-17 |