Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031429 | Method of obtaining position, exposure method, and method of manufacturing article | Masatoshi Endo, Akihiko Kawamura, Naoto Ohkawa, Takanori Morooka | 2018-07-24 |
| 7829263 | Exposure method and apparatus, coating apparatus for applying resist to plural substrates, and device manufacturing method | — | 2010-11-09 |