Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10234775 | Exposure apparatus, exposure method, and method of manufacturing article | Shinichiro Hirai, Junichi Motojima | 2019-03-19 |
| 10031429 | Method of obtaining position, exposure method, and method of manufacturing article | Masatoshi Endo, Akihiko Kawamura, Tetsuji Kazaana, Takanori Morooka | 2018-07-24 |