Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031429 | Method of obtaining position, exposure method, and method of manufacturing article | Masatoshi Endo, Akihiko Kawamura, Naoto Ohkawa, Tetsuji Kazaana | 2018-07-24 |
| 9665018 | Measuring apparatus, measuring method, lithography apparatus, and article manufacturing method | Masatoshi Endo | 2017-05-30 |