Issued Patents All Time
Showing 176–179 of 179 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5148036 | Multi-axis wafer position detecting system using a mark having optical power | Kenji Saitoh | 1992-09-15 |
| 5114236 | Position detection method and apparatus | Kenji Saitoh, Mitsutoshi Ohwada | 1992-05-19 |
| 4985186 | Process for producing optical element | Noriyuki Nose, Toshiyuki Nakajima, Eigo Kawakami, Takeshi Baba, Nobuo Kushibiki +1 more | 1991-01-15 |
| 4840473 | Optical device | Nobuo Kushibiki, Noriyuki Nose, Toshiyuki Nakajima, Takeshi Baba, Yukichi Niwa | 1989-06-20 |