Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9481595 | Method of producing optical element forming mold and optical element forming mold | Hiroyuki Kubo, Shigeru Hashimoto, Keiji Hirabayashi, Yusuke Owaki | 2016-11-01 |
| 7575661 | Reactive sputtering method | Yasuyuki Suzuki | 2009-08-18 |
| 7342715 | Multilayer film reflector for soft X-rays and manufacturing method thereof | Kyoko Imai, Kenji Ando, Hidehiro Kanazawa, Takayuki Miura, Kazue Takata | 2008-03-11 |
| 7116473 | Optical element with antireflection film | Hidehiro Kanazawa, Kenji Ando | 2006-10-03 |
| 7035000 | Antireflection film and optical element having the same | Hidehiro Kanazawa, Kenji Ando | 2006-04-25 |
| 6947209 | Antireflection film and optical element having the same | Hidehiro Kanazawa, Kenji Ando | 2005-09-20 |
| 6558507 | Plasma processing apparatus | Atsushi Yamagami, Satoshi Takaki | 2003-05-06 |
| 6333079 | Plasma CVD process | Satoshi Takaki | 2001-12-25 |
| 6279504 | Plasma CVD system | Satoshi Takaki | 2001-08-28 |
| 6152071 | High-frequency introducing means, plasma treatment apparatus, and plasma treatment method | Kazuyoshi Akiyama, Atsushi Yamagami, Satoshi Takaki | 2000-11-28 |
| 6145469 | Plasma processing apparatus and processing method | Atsushi Yamagami, Satoshi Takaki | 2000-11-14 |