Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7342715 | Multilayer film reflector for soft X-rays and manufacturing method thereof | Kyoko Imai, Kenji Ando, Koji Teranishi, Takayuki Miura, Kazue Takata | 2008-03-11 |
| 7286637 | Optical thin film and mirror using the same | Kyoko Imai, Kenji Ando | 2007-10-23 |
| 7229532 | Sputtering apparatus | Kenji Ando | 2007-06-12 |
| 7162009 | X-ray multi-layer mirror and x-ray exposure apparatus | Kenji Ando, Kyoko Imai | 2007-01-09 |
| 7116473 | Optical element with antireflection film | Kenji Ando, Koji Teranishi | 2006-10-03 |
| 7041391 | Method for forming thin films | Kenji Ando, Masaaki Matsushima, Minoru Otani, Yasuyuki Suzuki, Ryuji Biro | 2006-05-09 |
| 7035000 | Antireflection film and optical element having the same | Kenji Ando, Koji Teranishi | 2006-04-25 |
| 6947209 | Antireflection film and optical element having the same | Kenji Ando, Koji Teranishi | 2005-09-20 |
| 6472087 | Antireflection film, optical element with antireflection film, and production method of the antireflection film | Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Ryuji Biro | 2002-10-29 |
| 6458253 | Thin film production process and optical device | Kenji Ando, Minoru Otani, Yasuyuki Suzuki, Toshiaki Shingu, Ryuji Biro | 2002-10-01 |
| 6396626 | Antireflection film and optical element coated with the antireflection film | Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Ryuji Biro | 2002-05-28 |
| 6383346 | Method for forming thin films | Kenji Ando, Masaaki Matsushima, Minoru Otani, Yasuyuki Suzuki, Ryuji Biro | 2002-05-07 |
| 6261696 | Optical element with substrate containing fluorite as main ingredient, and method and apparatus for producing the optical element | Ryuji Biro, Minoru Otani, Kenji Ando, Yasuyuki Suzuki | 2001-07-17 |
| 6217719 | Process for thin film formation by sputtering | Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Ryuji Biro | 2001-04-17 |
| 5885712 | Anti-reflection film and optical system using the same | Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Ryuji Biro | 1999-03-23 |