| 7342715 |
Multilayer film reflector for soft X-rays and manufacturing method thereof |
Kyoko Imai, Kenji Ando, Koji Teranishi, Takayuki Miura, Kazue Takata |
2008-03-11 |
| 7286637 |
Optical thin film and mirror using the same |
Kyoko Imai, Kenji Ando |
2007-10-23 |
| 7229532 |
Sputtering apparatus |
Kenji Ando |
2007-06-12 |
| 7162009 |
X-ray multi-layer mirror and x-ray exposure apparatus |
Kenji Ando, Kyoko Imai |
2007-01-09 |
| 7116473 |
Optical element with antireflection film |
Kenji Ando, Koji Teranishi |
2006-10-03 |
| 7041391 |
Method for forming thin films |
Kenji Ando, Masaaki Matsushima, Minoru Otani, Yasuyuki Suzuki, Ryuji Biro |
2006-05-09 |
| 7035000 |
Antireflection film and optical element having the same |
Kenji Ando, Koji Teranishi |
2006-04-25 |
| 6947209 |
Antireflection film and optical element having the same |
Kenji Ando, Koji Teranishi |
2005-09-20 |
| 6472087 |
Antireflection film, optical element with antireflection film, and production method of the antireflection film |
Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Ryuji Biro |
2002-10-29 |
| 6458253 |
Thin film production process and optical device |
Kenji Ando, Minoru Otani, Yasuyuki Suzuki, Toshiaki Shingu, Ryuji Biro |
2002-10-01 |
| 6396626 |
Antireflection film and optical element coated with the antireflection film |
Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Ryuji Biro |
2002-05-28 |
| 6383346 |
Method for forming thin films |
Kenji Ando, Masaaki Matsushima, Minoru Otani, Yasuyuki Suzuki, Ryuji Biro |
2002-05-07 |
| 6261696 |
Optical element with substrate containing fluorite as main ingredient, and method and apparatus for producing the optical element |
Ryuji Biro, Minoru Otani, Kenji Ando, Yasuyuki Suzuki |
2001-07-17 |
| 6217719 |
Process for thin film formation by sputtering |
Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Ryuji Biro |
2001-04-17 |
| 5885712 |
Anti-reflection film and optical system using the same |
Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Ryuji Biro |
1999-03-23 |
