| 7455880 |
Optical element fabrication method, optical element, exposure apparatus, device fabrication method |
Minoru Otani |
2008-11-25 |
| 7301695 |
Anti-reflective film and optical element having anti-reflective film |
Minoru Otani, Hirotaka Fukushima |
2007-11-27 |
| 7041391 |
Method for forming thin films |
Kenji Ando, Masaaki Matsushima, Minoru Otani, Yasuyuki Suzuki, Hidehiro Kanazawa |
2006-05-09 |
| 6472087 |
Antireflection film, optical element with antireflection film, and production method of the antireflection film |
Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Hidehiro Kanazawa |
2002-10-29 |
| 6458253 |
Thin film production process and optical device |
Kenji Ando, Minoru Otani, Yasuyuki Suzuki, Toshiaki Shingu, Hidehiro Kanazawa |
2002-10-01 |
| 6396626 |
Antireflection film and optical element coated with the antireflection film |
Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Hidehiro Kanazawa |
2002-05-28 |
| 6383346 |
Method for forming thin films |
Kenji Ando, Masaaki Matsushima, Minoru Otani, Yasuyuki Suzuki, Hidehiro Kanazawa |
2002-05-07 |
| 6261696 |
Optical element with substrate containing fluorite as main ingredient, and method and apparatus for producing the optical element |
Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Hidehiro Kanazawa |
2001-07-17 |
| 6217719 |
Process for thin film formation by sputtering |
Hidehiro Kanazawa, Minoru Otani, Kenji Ando, Yasuyuki Suzuki |
2001-04-17 |
| 5911856 |
Method for forming thin film |
Yasuyuki Suzuki, Kenji Ando |
1999-06-15 |
| 5885712 |
Anti-reflection film and optical system using the same |
Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Hidehiro Kanazawa |
1999-03-23 |
| 5661596 |
Antireflection film and exposure apparatus using the same |
Kenji Ando, Yasuyuki Suzuki |
1997-08-26 |
