Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7455880 | Optical element fabrication method, optical element, exposure apparatus, device fabrication method | Minoru Otani | 2008-11-25 |
| 7301695 | Anti-reflective film and optical element having anti-reflective film | Minoru Otani, Hirotaka Fukushima | 2007-11-27 |
| 7041391 | Method for forming thin films | Kenji Ando, Masaaki Matsushima, Minoru Otani, Yasuyuki Suzuki, Hidehiro Kanazawa | 2006-05-09 |
| 6472087 | Antireflection film, optical element with antireflection film, and production method of the antireflection film | Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Hidehiro Kanazawa | 2002-10-29 |
| 6458253 | Thin film production process and optical device | Kenji Ando, Minoru Otani, Yasuyuki Suzuki, Toshiaki Shingu, Hidehiro Kanazawa | 2002-10-01 |
| 6396626 | Antireflection film and optical element coated with the antireflection film | Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Hidehiro Kanazawa | 2002-05-28 |
| 6383346 | Method for forming thin films | Kenji Ando, Masaaki Matsushima, Minoru Otani, Yasuyuki Suzuki, Hidehiro Kanazawa | 2002-05-07 |
| 6261696 | Optical element with substrate containing fluorite as main ingredient, and method and apparatus for producing the optical element | Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Hidehiro Kanazawa | 2001-07-17 |
| 6217719 | Process for thin film formation by sputtering | Hidehiro Kanazawa, Minoru Otani, Kenji Ando, Yasuyuki Suzuki | 2001-04-17 |
| 5911856 | Method for forming thin film | Yasuyuki Suzuki, Kenji Ando | 1999-06-15 |
| 5885712 | Anti-reflection film and optical system using the same | Minoru Otani, Kenji Ando, Yasuyuki Suzuki, Hidehiro Kanazawa | 1999-03-23 |
| 5661596 | Antireflection film and exposure apparatus using the same | Kenji Ando, Yasuyuki Suzuki | 1997-08-26 |