Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7193684 | Projection exposure mask, projection exposure apparatus, and projection exposure method | Kazuo Iizuka, Nobuyoshi Tanaka | 2007-03-20 |
| 7158210 | Projection exposure apparatus | Kazuo Iizuka, Nobuyoshi Tanaka | 2007-01-02 |
| 7030962 | Projection exposure mask, projection exposure apparatus, and projection exposure method | Kazuo Iizuka, Nobuyoshi Tanaka | 2006-04-18 |
| 5359389 | Exposure apparatus including two illuminating systems and exposure process using the same | — | 1994-10-25 |
| 5150152 | Exposure apparatus including device for determining movement of an object | Shinji Tsutsui | 1992-09-22 |
| 4998134 | Exposure apparatus | Koichi Matsushita, Hironori Yamamoto, Makoto Miyazaki, Kunitaka Ozawa, Hideki Yoshinari | 1991-03-05 |
| 4878086 | Flat panel display device and manufacturing of the same | Masao Totsuka, Yoshiharu Nakamura | 1989-10-31 |
| 4864360 | Exposure apparatus | Koichi Matsushita, Hironori Yamamoto, Makoto Miyazaki, Kunitaka Ozawa, Hideki Yoshinari | 1989-09-05 |
| 4814830 | Flat panel display device and manufacturing of the same | Masao Totsuka, Yoshiharu Nakamura | 1989-03-21 |
| 4768064 | Conveyor device for alignment | Mikio Nakasugi, Takao Yokomatsu | 1988-08-30 |
| 4749867 | Exposure apparatus | Koichi Matsushita, Hironori Yamamoto, Makoto Miyazaki, Kunitaka Ozawa, Hideki Yoshinari | 1988-06-07 |
| 4748477 | Exposure apparatus | Koichi Matsushita, Hironori Yamamoto, Makoto Miyazaki, Kunitaka Ozawa, Hideki Yoshinari | 1988-05-31 |
| 4737824 | Surface shape controlling device | Fumio Sakai | 1988-04-12 |
| 4708465 | Exposure apparatus | Hironori Yamamoto, Koichi Matsushita | 1987-11-24 |
| 4708466 | Exposure apparatus | Makoto Miyazaki | 1987-11-24 |
| 4676630 | Exposure apparatus | Koichi Matsushita, Hironori Yamamoto, Makoto Miyazaki, Kunitaka Ozawa, Hideki Yoshinari | 1987-06-30 |
| 4601560 | Focus adjustment in an alignment and exposure apparatus | Tamotsu Karasawa | 1986-07-22 |
| 4588288 | Static pressure bearing and transport device utilizing the same | Mikio Nakasugi, Takao Yokomatsu | 1986-05-13 |
| 4563820 | Aligning system | — | 1986-01-14 |
| 4496239 | Projection exposure apparatus | Mitsuya Sato | 1985-01-29 |
| 4422754 | Projection-printing apparatus | Hironori Yamamoto | 1983-12-27 |
| 4407627 | Automatic wafer orienting apparatus | Hiroshi Sato, Kei Takatsu | 1983-10-04 |
| 4370054 | Projection exposure apparatus | Hironori Yamamoto | 1983-01-25 |