Issued Patents All Time
Showing 76–77 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4998821 | Projection apparatus | Masakatsu Ohta, Shuichi Yabu | 1991-03-12 |
| 4994674 | Ion implantation apparatus capable of avoiding electrification of a substrate | Tadamoto Tamai | 1991-02-19 |