Issued Patents All Time
Showing 176–196 of 196 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436229 | Gas phase silicon etching with bromine trifluoride | Xuan Wang | 2002-08-20 |
| 6428053 | Micromachined fluidic coupler and method of making the same | Shuyun Wu | 2002-08-06 |
| 6345502 | Micromachined parylene membrane valve and pump | Xing YANG, Charles I. Grosjean, Xuan-Qi Wang | 2002-02-12 |
| 6334761 | Check-valved silicon diaphragm pump and method of fabricating the same | Ellis Meng, Xuan-Qi Wang, Charles I. Grosjean | 2002-01-01 |
| 6320145 | Fabricating and using a micromachined magnetostatic relay or switch | John A. Wright | 2001-11-20 |
| 6287831 | Cell lysis device | Sang LEE | 2001-09-11 |
| 6243474 | Thin film electret microphone | Tseng-Yang Hsu, Wen-Hsuan Hsieh | 2001-06-05 |
| 6240962 | Parylene micro check valve and fabrication method thereof | Xuan-Qi Wang | 2001-06-05 |
| 6185084 | Electrostatic particle transportation | Sang LEE, Amish Desai | 2001-02-06 |
| 6162367 | Gas-phase silicon etching with bromine trifluoride | Xuan Wang | 2000-12-19 |
| 6146543 | Microbellows actuator | Xing YANG | 2000-11-14 |
| 6094116 | Micro-electromechanical relays | John A. Wright | 2000-07-25 |
| 6071819 | Flexible skin incorporating mems technology | Fukang Jiang, Chihming Ho | 2000-06-06 |
| 6069392 | Microbellows actuator | Xing YANG | 2000-05-30 |
| 5994696 | MEMS electrospray nozzle for mass spectroscopy | Amish Desai, Terry Douglas Lee, Mike Davis | 1999-11-30 |
| 5921678 | Microfluidic sub-millisecond mixers | Amish Desai, Xing YANG, Elaine Marzluff, Dirk Bockenkamp, Stephen Mayo | 1999-07-13 |
| 5883310 | Micromachined hot-wire shear stress sensor | Chih-Ming Ho, Fukang Jiang, Chang Liu, Jin-Biao Huang | 1999-03-16 |
| 5724015 | Bulk micromachined inductive transducers on silicon | Denny K. Miu, Weilong Tang, Viktoria Temesvary, Shuyun Wu | 1998-03-03 |
| 5629918 | Electromagnetically actuated micromachined flap | Chih-Ming Ho, Denny K. Miu, Jeremy Tzong-Shyng Leu, Raanan Miller, Amish Desai +2 more | 1997-05-13 |
| 5252881 | Micro motors and method for their fabrication | Richard S. Muller, Longsheng Fan | 1993-10-12 |
| 4740410 | Micromechanical elements and methods for their fabrication | Richard S. Muller, Longsheng Fan | 1988-04-26 |