Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6767476 | Polishing composition for metal CMP | Shumin Wang, Steven Grumbine, Christopher C. Streinz | 2004-07-27 |
| 6592776 | Polishing composition for metal CMP | Shumin Wang, Steven Grumbine, Christopher C. Streinz | 2003-07-15 |
| 6136711 | Polishing composition including an inhibitor of tungsten etching | Steven Grumbine, Christopher C. Streinz | 2000-10-24 |
| 6083419 | Polishing composition including an inhibitor of tungsten etching | Steven Grumbine, Christopher C. Streinz | 2000-07-04 |