Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7053355 | System and method for lithography process monitoring and control | Jun Ye, R. Fabian W. Pease | 2006-05-30 |
| 7003758 | System and method for lithography simulation | Jun Ye, Yen-Wen Lu, Yu Cao, Luoqi Chen | 2006-02-21 |
| 6969837 | System and method for lithography process monitoring and control | Jun Ye, R. Fabian W. Pease | 2005-11-29 |
| 6969864 | System and method for lithography process monitoring and control | Jun Ye, R. Fabian W. Pease | 2005-11-29 |
| 6959255 | Method and apparatus for monitoring integrated circuit fabrication | Jun Ye | 2005-10-25 |
| 6892156 | Method and apparatus for monitoring integrated circuit fabrication | Jun Ye | 2005-05-10 |
| 6884984 | System and method for lithography process monitoring and control | Jun Ye, R. Fabian W. Pease | 2005-04-26 |
| 6879924 | Method and apparatus for monitoring integrated circuit fabrication | Jun Ye | 2005-04-12 |
| 6828542 | System and method for lithography process monitoring and control | Jun Ye, R. Fabian W. Pease | 2004-12-07 |
| 6820028 | Method and apparatus for monitoring integrated circuit fabrication | Jun Ye | 2004-11-16 |
| 6807503 | Method and apparatus for monitoring integrated circuit fabrication | Jun Ye | 2004-10-19 |
| 6806456 | System and method for lithography process monitoring and control | Jun Ye, R. Fabian W. Pease | 2004-10-19 |
| 6803554 | System and method for lithography process monitoring and control | Jun Ye, R. Fabian W. Pease | 2004-10-12 |
| 6064486 | Systems, methods and computer program products for detecting the position of a new alignment mark on a substrate based on fitting to sample alignment signals | Amir A. Ghazanfarian, Mark A. McCord, R. Fabian W. Pease, Thomas Kailath | 2000-05-16 |