Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6307682 | Zoom illumination system for use in photolithography | Jeffrey M. Hoffman, Joseph Marshall Kunick, Lev Ryzhikov | 2001-10-23 |
| 5724122 | Illumination system having spatially separate vertical and horizontal image planes for use in photolithography | — | 1998-03-03 |
| 5631721 | Hybrid illumination system for use in photolithography | Stuart Stanton, Gregg M. Gallatin, Frits Zernike | 1997-05-20 |