Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156920 | Lithography composition, a method for forming resist patterns and a method for making semiconductor devices | Kazuma Yamamoto, Maki ISHII, Tatsuro Nagahara | 2021-10-26 |
| 10451974 | Rinse composition, a method for forming resist patterns and a method for making semiconductor devices | Kazuma Yamamoto, Yuriko Matsuura, Tatsuro Nagahara | 2019-10-22 |