Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6322934 | Method for making integrated circuits including features with a relatively small critical dimension | Feng Jin | 2001-11-27 |
| 6248485 | Method for controlling a process for patterning a feature in a photoresist | — | 2001-06-19 |
| 6168904 | Integrated circuit fabrication | Chong-Cheng Fu | 2001-01-02 |
| 5780316 | Linewidth control apparatus and method | Hongzong Chew, Hamlet Herring, John Louis Ryan, Robert Ching-I Sun, Thomas Wolf +1 more | 1998-07-14 |
| 5264076 | "Integrated circuit process using a ""hard mask""" | David P. Favreau | 1993-11-23 |
| 4788117 | Semiconductor device fabrication including a non-destructive method for examining lithographically defined features | Dennis Earl Schrope, Tungsheng Yang | 1988-11-29 |
| 4510176 | Removal of coating from periphery of a semiconductor wafer | Nicholas A. Soos | 1985-04-09 |
| 4240195 | Dynamic random access memory | James T. Clemens, Frank J. Procyk, George M. Trout | 1980-12-23 |