Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6294468 | Method of chemical vapor depositing tungsten films | Sailesh Mansinh Merchant | 2001-09-25 |
| 6206976 | Deposition apparatus and related method with controllable edge exclusion | Annette M. Crevasse | 2001-03-27 |