Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10272540 | System and method for polishing substrate | Ying-Hsiu Tsai, Wei-Chen Chang, Yi-Ching Chiou | 2019-04-30 |
| 9669514 | System and method for polishing substrate | Ying-Hsiu Tsai, Wei-Chen Chang, Yi-Ching Chiou | 2017-06-06 |
| 6667239 | Chemical mechanical polishing of copper-oxide damascene structures | Nanaji Saka, Hilario Oh | 2003-12-23 |
| 6458013 | Method of chemical mechanical polishing | Nannaji Saka, Hilario Oh | 2002-10-01 |