Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8086473 | Method and system for managing operations and processes in healthcare delivery in a hospital | — | 2011-12-27 |
| 7139631 | Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication system | — | 2006-11-21 |
| 7052919 | Recipe cascading in a wafer processing system | — | 2006-05-30 |
| 7029381 | Apparatus and method for chemical mechanical polishing of substrates | Jason Melvin, Nam P. Suh | 2006-04-18 |
| 6984168 | Apparatus and method for chemical mechanical polishing of substrates | Jason Melvin, Nam P. Suh | 2006-01-10 |
| 6952622 | Robot pre-positioning in a wafer processing system | Dikran Babikian | 2005-10-04 |
| 6865437 | Robot pre-positioning in a wafer processing system | Dikran Babikian | 2005-03-08 |
| 6798529 | In-situ method and apparatus for end point detection in chemical mechanical polishing | Nannaji Saka, Jamie Nam | 2004-09-28 |
| 6768930 | Method and apparatus for resolving conflicts in a substrate processing system | — | 2004-07-27 |
| 6694218 | Method and apparatus for resolving conflicts in a substrate processing system | — | 2004-02-17 |
| 6678572 | Recipe cascading in a wafer processing system | — | 2004-01-13 |
| 6667239 | Chemical mechanical polishing of copper-oxide damascene structures | Nanaji Saka, Jiun-Yu Lai | 2003-12-23 |
| 6476921 | In-situ method and apparatus for end point detection in chemical mechanical polishing | Nannaji Saka, Jamie Nam | 2002-11-05 |
| 6458013 | Method of chemical mechanical polishing | Nannaji Saka, Jiun-Yu Lai | 2002-10-01 |
| 6418356 | Method and apparatus for resolving conflicts in a substrate processing system | — | 2002-07-09 |
| 4424706 | Engine with knock sensing using product component of knock vibration signal | — | 1984-01-10 |