Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7029381 | Apparatus and method for chemical mechanical polishing of substrates | Nam P. Suh, Hilario Oh | 2006-04-18 |
| 6984168 | Apparatus and method for chemical mechanical polishing of substrates | Nam P. Suh, Hilario Oh | 2006-01-10 |
| 6161962 | Bearing with sensor module | Michael L. French, Joseph A. Talafous | 2000-12-19 |