Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9256139 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Siegfried Alexander Tromp, Jacobus Josephus Leijssen +3 more | 2016-02-09 |