Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7271873 | Lithographic apparatus and device manufacturing method | Nicolas Lallemant, Martinus Cornelis Maria Verhagen, Marcel Beckers, Ronald Stultiens, Pascal Antonius Smits +3 more | 2007-09-18 |
| 7072021 | Lithographic apparatus and device manufacturing method | Nicolas Lallemant, Martinus Cornelis Maria Verhagen, Marcel Beckers, Ronald Stultiens, Pascal Antonius Smits +3 more | 2006-07-04 |