Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8988657 | Lithographic apparatus and device manufacturing method | Frank Johannes Jacobus Van Boxtel, Jeroen Gerard Gosen, Anthonie Kuijper, Arjan Hubrecht Josef Anna Martens, Jean-Philippe Xavier Van Damme +4 more | 2015-03-24 |