Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7724349 | Device arranged to measure a quantity relating to radiation and lithographic apparatus | Wouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen, Niels Machiel Driessen, Vadim Yevgenyevich Banine, Johannes Christiaan Leonardus Franken +1 more | 2010-05-25 |