Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11307507 | Method to obtain a height map of a substrate having alignment marks, substrate alignment measuring apparatus and lithographic apparatus | Arjan Hölscher, Alex Pascal Ten Brink, Petrus Franciscus Van Gils | 2022-04-19 |
| 10915033 | Lithographic apparatus and device manufacturing method | Jeroen COTTAAR | 2021-02-09 |
| 10289009 | Lithographic apparatus, control method and computer program product | Wim Tjibbo Tel | 2019-05-14 |