Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5821014 | Optical proximity correction method for intermediate-pitch features using sub-resolution scattering bars on a mask | Jang Fung Chen, Thomas Laidig | 1998-10-13 |
| 5663893 | Method for generating proximity correction features for a lithographic mask pattern | Thomas Laidig | 1997-09-02 |