Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8151223 | Source mask optimization for microcircuit design | — | 2012-04-03 |
| 8120753 | Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process | Tamer Coskun, Sangbong Park, Jang Fung Chen | 2012-02-21 |
| 7494753 | Method, program product and apparatus for improving calibration of resist models used in critical dimension calculation | Jang Fung Chen, Tamer Coskun, Sangbong Park, Ting-Yin Chen | 2009-02-24 |