Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9556516 | Method for forming Ti-containing film by PEALD using TDMAT or TDEAT | Noboru Takamure | 2017-01-31 |
| 9142393 | Method for cleaning reaction chamber using pre-cleaning process | Atsuki Fukazawa | 2015-09-22 |