Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972961 | Purge step-controlled sequence of processing semiconductor wafers | Toru Sugiyama | 2011-07-05 |
| 7829159 | Method of forming organosilicon oxide film and multilayer resist structure | — | 2010-11-09 |
| 7712435 | Plasma processing apparatus with insulated gas inlet pore | Yu Yoshizaki | 2010-05-11 |
| 7037855 | Method of forming fluorine-doped low-dielectric-constant insulating film | Naoto Tsuji, Yozo Ikedo, Shuzo Hebiguchi | 2006-05-02 |