Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084104 | Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer deposition | Hiroshi Shinriki, Daekyun Jeong | 2011-12-27 |
| 6043162 | Method of processing semiconductor substrate | Akira Shimizu | 2000-03-28 |