Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8780314 | Strengthened structural module and method of fabrication | Matti Putkonen, Arto J. Pakkala | 2014-07-15 |
| 7022613 | Reduced cross-contamination between chambers in a semiconductor processing tool | Christophe Pomarede, Eric James Shero | 2006-04-04 |
| 6797617 | Reduced cross-contamination between chambers in a semiconductor processing tool | Christophe Pomarede, Eric James Shero | 2004-09-28 |