Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8088225 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Tony Keeton +7 more | 2012-01-03 |
| 7648579 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Tony Keeton +7 more | 2010-01-19 |