| 6410923 |
Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes |
— |
2002-06-25 |
| 6051839 |
Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes |
— |
2000-04-18 |
| 5818605 |
Method and apparatus for high resolution sensing of engraving stylus movement |
George B. Thiel, Douglas R. Adler, Riyazhassan M. Asaria |
1998-10-06 |
| 5563415 |
Magnetic lens apparatus for a low-voltage high-resolution electron microscope |
— |
1996-10-08 |
| 5336891 |
Aberration free lens system for electron microscope |
— |
1994-08-09 |
| 5150001 |
Field emission electron gun and method having complementary passive and active vacuum pumping |
— |
1992-09-22 |
| 5008549 |
High performance, vacuum compatible electromagnetic lens coil |
— |
1991-04-16 |
| 4833362 |
Encapsulated high brightness electron beam source and system |
— |
1989-05-23 |
| 4760567 |
Electron beam memory system with ultra-compact, high current density electron gun |
— |
1988-07-26 |
| 4740705 |
Axially compact field emission cathode assembly |
— |
1988-04-26 |
| 4725736 |
Electrostatic electron gun with integrated electron beam deflection and/or stigmating system |
— |
1988-02-16 |
| 4414474 |
Corrector for axial aberrations in electron optic instruments |
— |
1983-11-08 |
| 4389571 |
Multiple sextupole system for the correction of third and higher order aberration |
— |
1983-06-21 |
| 4303864 |
Sextupole system for the correction of spherical aberration |
David A. Kopf |
1981-12-01 |