Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes

Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes

US Patent 6051839 · Granted Apr 18, 2000

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Magnetic lens apparatus for use in high-resolution scanning electron microscopes2002
Method and apparatus for high resolution sensing of engraving stylus movement1998
Magnetic lens apparatus for a low-voltage high-resolution electron microscope1996
Aberration free lens system for electron microscope1994
Field emission electron gun and method having complementary passive and active v1992
High performance, vacuum compatible electromagnetic lens coil1991
Encapsulated high brightness electron beam source and system1989
Electron beam memory system with ultra-compact, high current density electron gu1988
Axially compact field emission cathode assembly1988
Electrostatic electron gun with integrated electron beam deflection and/or stigm1988
Corrector for axial aberrations in electron optic instruments1983
Multiple sextupole system for the correction of third and higher order aberratio1983