Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6274058 | Remote plasma cleaning method for processing chambers | Ravi Rajagopalan, Patricia M. Liu, Pravin K. Narwankar, Huyen Tran, Padmanabhan Krishnaraj +1 more | 2001-08-14 |