Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544896 | Method for enhancing etching of TiSix | Songlin Xu, Xueyu Qian | 2003-04-08 |
| 5928965 | Method for dry-etching of silicon substrate | Hideyuki Shoji | 1999-07-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544896 | Method for enhancing etching of TiSix | Songlin Xu, Xueyu Qian | 2003-04-08 |
| 5928965 | Method for dry-etching of silicon substrate | Hideyuki Shoji | 1999-07-27 |