Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10309013 | Method and system for identifying a clean endpoint time for a chamber | Ilias Iliopoulos, Jose Albor | 2019-06-04 |
| 10269601 | Chamber leak and gas contaimination detection | Patrick L. Smith, Ilias Iliopoulos, Songfu Jiang, Bo Zhang | 2019-04-23 |
| 10002748 | Detection of grounding strap breakage | Ilias Iliopoulos, Kelby Yancy, Chunsheng Chen | 2018-06-19 |
| 9704762 | Application of in-line glass edge-inspection and alignment check in display manufacturing | Ilias Iliopoulos, Kelby Yancy, Chunsheng Chen | 2017-07-11 |
| 9653269 | Detecting arcing using processing chamber data | Kelby Yancy, Chunsheng Chen, Ilias Iliopoulos | 2017-05-16 |