Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10309013 | Method and system for identifying a clean endpoint time for a chamber | Ilias Iliopoulos, Shuo Na | 2019-06-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10309013 | Method and system for identifying a clean endpoint time for a chamber | Ilias Iliopoulos, Shuo Na | 2019-06-04 |