Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10269601 | Chamber leak and gas contaimination detection | Shuo Na, Patrick L. Smith, Ilias Iliopoulos, Bo Zhang | 2019-04-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10269601 | Chamber leak and gas contaimination detection | Shuo Na, Patrick L. Smith, Ilias Iliopoulos, Bo Zhang | 2019-04-23 |