| 8071167 |
Surface pre-treatment for enhancement of nucleation of high dielectric constant materials |
Shreyas Kher, Craig Metzner |
2011-12-06 |
| 7569500 |
ALD metal oxide deposition process using direct oxidation |
Craig Metzner, Shreyas Kher, Vidyut Gopal, Shankarram Athreya |
2009-08-04 |
| 7569501 |
ALD metal oxide deposition process using direct oxidation |
Craig Metzner, Shreyas Kher, Vidyut Gopal, Shankarram Athreya |
2009-08-04 |
| 7531468 |
System and method for forming a gate dielectric |
Craig Metzner, Shreyas Kher |
2009-05-12 |
| 7304004 |
System and method for forming a gate dielectric |
Craig Metzner, Shreyas Kher |
2007-12-04 |
| 7067439 |
ALD metal oxide deposition process using direct oxidation |
Craig Metzner, Shreyas Kher, Vidyut Gopal, Shankarram Athreya |
2006-06-27 |
| 6858547 |
System and method for forming a gate dielectric |
Craig Metzner, Shreyas Kher |
2005-02-22 |
