Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9386680 | Detecting plasma arcs by monitoring RF reflected power in a plasma processing chamber | Jian J. Chen, Mohamad A. Ayoub | 2016-07-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9386680 | Detecting plasma arcs by monitoring RF reflected power in a plasma processing chamber | Jian J. Chen, Mohamad A. Ayoub | 2016-07-05 |