Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8264154 | Method and apparatus for pulsed plasma processing using a time resolved tuning scheme for RF power delivery | Valentin N. Todorow, Kartik Ramaswamy | 2012-09-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8264154 | Method and apparatus for pulsed plasma processing using a time resolved tuning scheme for RF power delivery | Valentin N. Todorow, Kartik Ramaswamy | 2012-09-11 |