Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5507874 | Method of cleaning of an electrostatic chuck in plasma reactors | Yuh-Jia Su | 1996-04-16 |
| 5220515 | Flow verification for process gas in a wafer processing system apparatus and method | Fred Freerks | 1993-06-15 |