Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5579718 | Slit valve door | — | 1996-12-03 |
| 5220515 | Flow verification for process gas in a wafer processing system apparatus and method | Richard Muh | 1993-06-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5579718 | Slit valve door | — | 1996-12-03 |
| 5220515 | Flow verification for process gas in a wafer processing system apparatus and method | Richard Muh | 1993-06-15 |